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|ECE 4100 - Introduction to Microelectronic Fabrication|
(Lab required) Introduction to the fabrication of integrated circuits (ICs). Emphasis is on silicon based devices. Topics include water preparation, oxidation, thin film deposition, diffusion and ion implantation, lithography, wet and dry etching and metallization. An introduction to MEMS and micromachining technology is given. Prerequisite: ECE 3670.
- 4.0 Credit hours
Engineering, Engineering lab
Electrical and Computer Eng. Department
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