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Detailed Course Information


Fall 2020
Apr 23, 2021
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ECE 4100 - Introduction to Microelectronic Fabrication
(Lab required) Introduction to the fabrication of integrated circuits (ICs). Emphasis is on silicon based devices. Topics include water preparation, oxidation, thin film deposition, diffusion and ion implantation, lithography, wet and dry etching and metallization. An introduction to MEMS and micromachining technology is given. Prerequisite: ECE 3670.

4.0 Credit hours

Engineering, Engineering lab

Electrical and Computer Eng. Department

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